Product name: oxygen

CAS ： 7782-44-7

English name Oxygen

Liquid oxygen - use

High purity oxygen gas is mainly used for thermal oxidation, diffusion, chemical vapor deposition, plasma etching and other processes of semiconductor devices. It can also be used for the manufacture of optical fiber and color picture tube and as standard gas, correction gas and zero gas. It is used as an oxidation source and a reagent to produce high-purity water. For MOS field effect devices, the oxide layer must be quite dense. The dry oxidation with high-purity oxygen can meet the production requirements with compact structure, less positive charge and high voltage withstand. Mixed with carbon tetrafluoride, it can be used for plasma etching.

Liquid oxygen - safety

Combustion-supporting compressed gas, non-toxic. However, exposure to high concentration oxygen has adverse effects on the lung and central nervous system. All combustible substances, especially oil and grease, shall not contact with high concentration of oxygen. All possible ignition sources must be closed or evacuated. It shall be placed in a cool place. It is forbidden to approach acids, alkalis, greases, flammable and explosive substances, high temperature heat sources and electric sparks, and avoid collision.