Phosphorus trifluoride (PF3)

CAS No.：7783-55-3

molecular weight：87.969

Application: Gas generation, fluorinating agent, epitaxy, ion implantation. As a source of gaseous phosphorus ion injection.

physical property

Phosphorus trifluoride is an inorganic compound with the chemical formula PF3. It is a colorless and odorless toxic gas at room temperature and pressure. When in liquid form, it is a colorless and transparent liquid. It does not emit much smoke in the air and is quite stable. When heated, it reacts with hydrogen to produce PH3, and can react with water to produce phosphite and hydrogen fluoride. It can also decompose in alkali. Soluble in ethanol. Do not corrode glass except at high temperatures.